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MEMS-Based Z-Axis Nanopositioner for STM
- A 1-DOF z-axis piezoelectric nanopositioner
- Designed and built to replace slow and bulky STM piezotubes
- Batch fabricated to reduce costs
Z-Axis Control in Active AFM Array Microcantilevers
- An on-chip electrothermal actuator to our previously designed microcantilevers
- Equipped with on-chip piezoelectric actuation and piezoelectric differential sensing
Fabrication of silicon-based non-contact AFM microcantilever
- Stiff silicon microcantilevers equipped with on-chip piezoelectric actuation and sensing
- Batch fabricated to reduce costs
Fabrication, Design, and Control of High-Bandwidth Nanopositioning Systems
- Introduction of novel nanopositioning systems into Scanning Probe Microscopy (SPM)
- Includes various control schemes to improve the high-speed, high-resolution performance of the system
MEMS Force Sensing with Feedback Control
- MEMS force sensors of varying designs with a movable shuttle suspended by flexures
- Closed-loop control strategies are applied for precise measurement
