Selecting a design concept for a nanopositioning platform depends on parameters ranging from the available actuation and sensing mechanisms to the required performance characteristics for the intended application. Among these characteristics, the mechanical bandwidth of the nanopositioning platform plays a crucial role in maximizing the achievable imaging rate, and flexure-based piezoelectrically actuated nanopositioners are the most notable choice for high-speed applications.
We introduce a novel high-bandwidth 3D nanopositioner and a control system with the ultimate goal of incorporation into a scanning probe microscope for high-speed imaging. The device is instrumented with a high-resolution interferometer sensor, resulting in a high-bandwidth, high-precision nanopositioning system. A parallel kinematic flexure system achieves high bandwidths along both in-plane axes. Various control schemes are introduced to improve the high-speed, high-resolution performance of the nanopositioning system. Damping controls are designed for and applied to the fast axis of the nanopositioner. The damping loop is enclosed in an outer feedback loop with a proper tracking controller to further achieve the desired tracking performance. The proposed nanopositioner is then integrated into an Atomic Force Microscope (AFM) for video-rate imaging.
Current Researchers
Erfan Khodabakhshi
Erfan received his M.Sc. degree in Mechanical Engineering – Mechatronics in 2016 from the Amirkabir University of Technology. He has a wide knowledge of…
Prosanto Biswas
Prosanto Biswas received his B.Sc. in Electrical and Electronic Engineering from the Bangladesh University of Engineering and Technology, Dhaka, Bangladesh in…