A MEMS (Microelectromechanical Systems) force sensor is a highly precise device designed to detect and measure force in micro scale. It typically comprises micro-sized structures that deform under applied force, generating electrical signals proportional to the force exerted.
We introduce MEMS force sensors with different designs that comprise a movable shuttle suspended by flexures, resembling a spring-mass-damper system. In response to external forces, the shuttle undergoes displacement, influenced by the stiffness of the flexures. However, as force levels increase, the flexure stiffness becomes dependent on displacement, leading to nonlinear force-displacement characteristics. To ensure precise measurement and mitigate open-loop issues, conducting experiments in closed loop is preferred. Thus, introducing actuators into the system allows the sensor’s output signal to be utilized in a feedback loop, maintaining the force sensor at the null position. Consequently, the system’s responsiveness shifts to the control signal rather than the stiffness, enhancing stability, robustness, and adaptability to changing conditions. This configuration enables the detection of a wide range of forces, from a few nN to the μN range.
Depending on specific applications, we have developed a variety of designs and structures. Examples include a high dynamic range force sensor, a double-stage MEMS force sensor featuring an on-chip nanopositioner, and a micro-gripper. Each of these structures incorporates different closed-loop strategies based on their individual applications.
Current Researchers
Diyako Dadkhah
Diyako Dadkhah received his BS in mechanical engineering from the Sharif University of Technology, Tehran, Iran, in 2021. He ranked 115th (top 0.07%) among near 163,000 participants in the national universities entrance exam. Mainly, he focused on…