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LDCN Lab

The University of Texas at Dallas

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  • Research
    • MEMS-Based Z-Axis Nanopositioner for STM
    • Z-Axis Control in Active AFM Array Microcantilevers Using On-Chip Electrothermal Actuator
    • Fabrication of silicon-based non-contact AFM microcantilever
    • Fabrication, Design, and Control of High-Bandwidth Nanopositioning Systems
    • MEMS Force Sensing with Feedback Control
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