Micromachined 3D high Q inductors (solenoid, spiral, toroidal) for RF front-end.
On-chip tunable 3D solenoid inductors.
RF MEMS Switches.
MEMS-based tunable nano-photonic crystals (w/ U. Colorado).
Thermo-optic tunable light modulator.
Polymeric MEMS-based tunable grating.
Metallic micro/nano grippers.
Polymer microgrippers for biological sample manipulation.
Improved optoelectronic device packaging using MEMS.
Microneedle array for painless drug delivery applications.
Wireless micro-neuro transponder for neuroprosthetics.
Nanoporous microcapsules for islet encapsulation.
Microfluidic chip w/ active/passive micro-mixers.